Course summary

    1. CAMECA Global Presentation

    2. Dictionary for CAMECA words & acronyms

    1. Dynamic Secondary Ion Mass Spectrometry

    2. SIMS principles / basics

    1. Compositional Measurement of Confined SiGe Devices

    2. Compositional Measurement of Thin Multilayers in Patterned Wafer Pads

    3. Statistical Process Control of p-mos Logic BSiGe Monitoring

    4. SiP Shallow Implant Metrology for n-mos Logic Production

    5. Arsenic Shallow Implant Monitoring

    1. AKONIS Technical Presentation

    2. Statistical Process Control of p-mos Logic BSiGe Monitoring

    3. SiP Shallow Implant Metrology for n-mos Logic Production

    4. Arsenic Shallow Implant Monitoring

    5. Etching monitoring of advanced forksheet devices

    1. Statistical Process Control of p-mos Logic BSiGe Monitoring

    2. SiP Shallow Implant Metrology for n-mos Logic Production

    3. Arsenic Shallow Implant Monitoring

    4. Etching monitoring of advanced forksheet devices

    1. Principles of Dynamic SIMS

About this course

  • 20 lessons
  • 1 hour of video content