Course summary

    1. CAMECA Global Presentation

    2. Dictionary for CAMECA words & acronyms

    1. Dynamic Secondary Ion Mass Spectrometry

    2. SIMS principles / basics

    1. Principles of Dynamic SIMS

    2. Dynamic SIMS for Semiconductors

    3. Characterization of MAX and MXene samples

    4. SIMS Measurements with a Large Scale-to-Resolution Ratio

    1. Thin Film Metrology and Ultra Shallow Implant Process Control

    2. Boron Implant Characterization : Advantages of EXLIE SIMS over PCOR

    1. Last publications

About this course

  • 11 lessons
  • 3 hours of video content